Faculty

The CIEMS research center brings together five leading MEMS/NEMS researchers who have made major contributions to fabrication, integration, and encapsulation technologies, as well as specific contributions to the understanding of surface and interface phenomenon for MEMS.

Professor Roger Howe, Stanford University

Professor Howe's research interests include design and fabrication of microsensors and microactuators, development of merged CMOS-microstructure processes and biomimetic nanofabrication processes. Profs. Howe and Maboudian have collaborated with the outstanding MEMS surface-science research group at Sandia National Labs, Albuquerque, NM

Professor Howe received a Ph.D. and M.S. in Electrical Engineering from the University of California Berkeley and a B.S. in Applied Physics from Harvey Mudd College.

Professor Howe's Home Page

Professor Olav Solgaard, Stanford University

Professor Solgaard has made significant contributions to MEMS technology and its applications to inertial sensors, displays, and optical- and RF-MEMS-based signal processing. His thesis work involved development of light modulators for integration of fiber optics with semiconductor electronic circuits, and included the invention of the Deformable Grating Light Valve. His research interests include:

Optical communication and sensing

• Fiber optics, optical networks, optical switches
• Wireless optical communication
• Distributed sensor networks
• Spectroscopy and environmental monitoring

Microphotonics

• MEMS phased arrays and adaptive optics
• Femto-second laser pulse instrumentation
• Optical coherence tomography
• Maskless lithography
• Autonomous sensors
• Fabrication technology for microoptical devices
• Photonic crystals

Biological Applications of MEMS

• Microinstrumentation for genetic studies
• Integrated bio-sensors

Professor Solgaard received a Ph.D. and M.S. in Electrical Engineering from Stanford University and a B. S. in electrical engineering from the Norwegian Institute of Technology.

Professor Solgaard's Home Page

Professor Tom Kenny, Stanford University

Professor Kenny has always been interested the properties of small structures. His PhD research was carried out in the Physics Department at UC Berkeley, and focused on a measurement of the heat capacity of a monolayer of Helium atoms. After graduating, his research at the Jet Propulsion Laboratory focused on the development of a series of microsensors which use tunneling displacement transducers to measure small signals. Currently, at Stanford, research in Tom's group covers many areas including MEMS devices to detect small forces, studies of gecko adhesion, micromechanical resonators, and heat transfer in microchannels.

Professor Kenny's Home Page

Professor Roya Maboudian, University of California Berkeley

Professor Maboudian conducts cutting-edge research in the areas of micro- and nano-electromechanical Systems, surface and materials processes, stiction, wear and reliability, microchemical systems, high temperature materials for on-chip power sources, sensors for harsh environments, and environmentally benign processing and manufacturing.

Semiconductors

• Fabrication processes for silicon and silicon carbide
• Surface chemistry of oxidation, passivation, etching, growth, and doping
• Atomic-scale manipulation of surface chemical, electrical and mechanical properties
• Metallization processes

Tribology and Lubrication

• Adhesion, friction and wear characteristics of MEMS devices
• Structure vs. mechanical properties of thin films.

Surface and Interface Physics

• Atomic and electronic structure
• Micro- and nano-mechanics
• Metal/semiconductor interface
• Dynamics of gas-surface interactions.

Professor Maboudian received a Ph.D. and M.S. in Applied Physics from the California Institute of Technology and a B.S. in Electrical Engineering from the Catholic University of America.

Professor Maboudian's Home Page

Professor Tsue Jae King, University of California Berkeley

Professor King Liu is the director of the world-renowned UC-Berkeley Microfabrication Laboratory. She has collaborated with Professor Maboudian on innovative research programs on surface science and its applications to MEMS and novel electronic device structures and integration technologies.

Her research interests include:

• Nanoscale CMOS devices and technology
• Novel non-volatile memory devices and technology
• M/NEMS technology for monolithic microsystems and wireless communications
• TFT technology for flat-panel displays and plastic electronics

Professor King Liu received her Ph.D, M.S. and B.S. in Electrical engineering from Stanford University.

Professor King Liu's Home Page

Professor Krishna Rajan, Iowa State University

Professor Krishna Rajan leads an NSF research center focused on informatics-inspired materials design, in which new material development is guided by insights from data fusion of multi-scale data sets derived from fundamental materials theory, process sequence descriptions, and property measurements. He and his group have the expertise to provide guidance into new surface coating materials and help digitally archive the materials, processes, and experimental results.

Professor Rajan's Home Page

Dr. J. Provine, Stanford University

Dr. J. Provine has undertaken cutting-edge research in the areas of optics, photonics, and fabrication.

Dr. Carlo Carraro, University of California Berkely

Dr. Carlo Carraro contributes expertise in areas essential to the progress of the CIEMS center. He is currently studying the fields of surface science, atomic beams, computational methods, thin films and membranes, and complex fluids.

 

 

Dr. Carraro's Home Page