Research

Motivation
Microshell Testing
Micro Instrumentation
Low Loss Surfaces
Robust Coatings
MVD Coatings
Photonic Materials

Faculty

Roger Howe
Olav Solgaard
Tom Kenny
Roya Maboudian
Tsu-Jae King Liu
Krishna Rajan
J. Provine
Carlo Carraro

Students

Stanford
UC Berkeley
Iowa State

Sponsors

Agilent
Boeing
Bosch
Epson
HP
QMT
DARPA MTO

Links

Presentations

Errors, omissions, corrections? Email:

Links

This page contains additional links and content for those interested in learning more about the Center and surfaces.

CIEMS Graphics

Useful graphics for creating CIEMS related presentations, documents, and images.

CIEMS Logo (pdf)

CIEMS Logo (AI)

CIEMS Powerpoint Template - Blue Background - 2006-11-09 (ppt)

CIEMS Powerpoint Template - White Background - 2007-05-22 (ppt)

aging environments. The incomplete knowledge about MEMS surfaces and their role in determining fracture and fatigue mechanisms has resulted in designers adopting “rules of thumb” which ensure large safety margins. Such conservative designs result in lower sensitivities for devices that depend on the absolute amplitude of motion, such as vibratory rate gyroscopes, and limit the range of microactuators in applications such as micro-optical scanners. The expansion of MEMS into new applications, especially those involving contact or exposure to harsh environments, has been hamstrung by the lack of basic understanding of structural surfaces, surface coatings, and microencapsulation processes and how they impact the performance of MEMS.