
Research
MotivationMicroshell Testing
Micro Instrumentation
Low Loss Surfaces
Robust Coatings
MVD Coatings
Photonic Materials
Faculty
Roger HoweOlav Solgaard
Tom Kenny
Roya Maboudian
Tsu-Jae King Liu
Krishna Rajan
J. Provine
Carlo Carraro
Links
CIEMS Graphics
Presentations
Presentations
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Students
The Center on Interfacial Engineering in Microelectromechanical Systems (CIEMS) brings together many talented Graduate and Undergraduate students from three world-class universities.Nathan Klejwa, Stanford University

Nathan is working on low-temperature wafer-level vacuum encapsulation of surface measurement devices.
Robert Hennessy , Stanford University
Robert works on understanding and measuring the effects of charging on MEMS devices.